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  Microfabrication

 

  
Actuator  An energized mechanism that activates a device. For example, a solenoid is a magnetic actuator that might be used to open a lock by electronic control. MEMS actuators such as comb drives and micromotors drive mechanisms, while actuators such as micropumps and valves manipulate fluids.

 
   
Batch Fabrication A manufacturing process in which large numbers of devices are made simultaneously in a single process. Batch fabrication makes integrated circuits and MEMS economical in high volumes. 

 
   
BioMEMS  This term is used when referring to MEMS devices for the biotechnology field. While MEMS is a general term, BioMEMS is a more specific subset of MEMS.

 
   
Bulk Micromachining  A micromachining technology in which the microdevice is formed into the base material (called a substrate) by etching away extraneous material (like a sculptor carving a statue out of a block of stone). Bulk micromachined MEMS are usually made from silicon and have larger dimensions than surface micromachined MEMS. Bulk micromachining is widely used to make pressure sensors and accelerometers.

 
   
Device  An invention or instrument for a specific purpose, usually a simple function. A transistor is an electronic device, and a tilting micromirror is a mechanical device, for example.

 
   
EFAB™
Technology		 MEMGen’s proprietary micromachining technology that creates complex, 3-D micro-devices composed of up to hundreds of layers. While other micromachining technologies use complex processes to fabricate simple structures, EFAB can produce complex structures using a simple process. EFAB can produce a virtually unlimited variety of microdevices and MEMS.

 
   
IC  Integrated Circuit – An electronic circuit comprised of a large number of microscopic electronic components such as transistors formed together as a single solid piece, also called a microchip. Integrated circuits are made from semiconductors such as silicon. 

 
   
Instant Mask™
tool		 MEMGen’s proprietary technology for rapidly patterning micromachined layers. An Instant Mask is used to rapidly create any desired pattern on a substrate in order to build microstructures layer by layer.

 
   
LIGA  A micromachining technology in which X-ray radiation is used in the production of high-aspect ratio, precision microstructures. LIGA parts are typically 2D extruded metal shapes.

 
   
MEMS  Micro Electro Mechanical System – A microscopic device with both electrical and mechanical functionality, which is manufactured in a batch process. Less formally, the term MEMS is often used to describe batch-fabricated mechanical devices even when there is no electrical functionality or system (i.e. a single mechanical component), or interchangeably with MST or micromachines. For more information, see what are MEMS.

 
   
Microchip  Integrated circuits after manufacture are cut into rectangular pieces called microchips or simply chips. However, MEMS or any microdevice fabricated in this manner may be referred to as a microchip.

 
   
Microfabrication  A manufacturing technology for making microscopic devices, such as integrated circuits or MEMS. Microfabrication usually based on specialized batch processing technologies developed for the semiconductor industry. Typical microfabrication processes include photolithography, deposition, and etching. EFAB is a new microfabrication technology developed by MEMGen.

 
   
Micromachines  Mechanical devices with microscopic dimensions. This term is preferred in Japan and is used interchangeably with MEMS and MST, although it may refer to devices built with laser, EDM, or other precision machining techniques, which would not usually be considered MEMS or MST.

 
   
Micromirrors MEMS technology is used to make microscopic mirrors which manipulate light for applications such as optical switching and projection displays. The popularity of micromirrors in some circles have created a perception that MEMS and micromirrors are synonymous. It is important to recognize that micromirrors are just one of many diverse applications of MEMS technology.

 
   
Micron Short for micrometer, a unit of measure that is 1 millionth of a meter, or 1 thousandth of a millimeter. A human hair is 100 microns in diameter, and a human cell is typically several microns across.

 
   
Microtechnology Technology dealing with matter on the size scale of microns (1 millionth of a meter). Microtechnology is a broad term, and can refer to microelectronics, MEMS, or any technology that manipulates matter on a micron scale.

 
   
MOEMS Micro Opto Electro Mechanical Systems – This term refers to MEMS devices with optical functionality. While MEMS is a general term, MOEMS is a more specific subset of MEMS. MOEMS is also used interchangeably with “Optical MEMS”.

 
   
MST Micro System Technology – The term MST is preferred in Europe in place of MEMS. The terms are used interchangeably, although MST is broader and can include microelectronics and other devices with no mechanical functionality, such as arrays of chemical compounds used in biochips.

 
   
Nanotechnology Technology dealing with matter on a molecular size scale, on the order of nanometers (1 billionth of a meter). Nanotechnology typically deals with molecular, chemical, and quantum phenomenon rather than the mechanical phenomenon more prevalent in MEMS or the solid-state physics of microelectronics. Nanotechnology and MEMS are distinct and largely complimentary technologies.

 
   
Semiconductor A material with the unusual property of being either electrically conducting or insulating depending on the addition of impurities and applied electric fields. Semiconductors are essential materials for the construction of integrated circuits and most modern electronics. Silicon is the most commonly used semiconductor, while others such as gallium arsenide, germanium, or indium phosphide, are used in specialized applications.

 
   
Sensor A sensor measures a physical variable such as temperature or pressure.

 
   
Surface Micromachining A micromachining technology in which the microdevice is formed by adding layers of material on top of a supporting base or substrate (like painting on a canvas). Surface micromachined devices are usually one to three structural layers thick and are built on top of a silicon substrate. Surface micromachining is the most widely used technology for micromirrors. EFAB is also based on layers built on a substrate but can produce hundreds of layers and produce more complex structures than surface, bulk, or LIGA micromachining.

 
   
Transducer A transducer converts one form of energy into another. Many sensors operate on the principle of transduction, for example, converting a pressure signal into an electrical signal.

 
 
Wafer Fabrication Integrated circuits are manufactured on wafer-shaped slices of semiconductor material, such as silicon. Wafer fabrication usually refers to the manufacture of integrated circuits but can also refer to the manufacture of semiconductor-based MEMS.
 

 

 
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