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etching
 
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etching
 
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Microlithography |
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Microlithography is the technology used to image a pattern
from a photomask
onto a silicon wafer coated with a light sensitive material called
photoresist.
Light is passed through the photomask, exposing the
photoresist on the wafer and creating the blueprint for the metal that will be
deposited on it. Wafers are eventually cut, layered and packaged together,
forming integrated circuits.
Electron-beam or laser beam pattern generators are an essential part of this
process. These tools are used to create the photomask - a glass plate called
photoblank in soda lime or quartz containing the microscopic chrome pattern of
an integrated circuit. The process of making a chip begins with the design of
the circuit. Circuit designers use advanced design software to generate a
pattern layout - a blueprint of the chip. This information is then transferred
to a photomask pattern generator, which uses an electron-beam or a laser beam to
draw the pattern on photoblank covered with photoresist. This photoblank is then
developed and etched with chrome, creating the photomask. |
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