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Our primary tasks in
the area involve:
-Micro-patterning
through masking followed by wet or dry etching, including RIE (Reactive Ion
Etching).
-Modeling
and manufacture specific multi-layer coatings to optimize
reflection/transmission at particular wavelengths.
-Use
brazing and specialty low temperature soldering techniques to join glass to
metal or other suitable materials.
-Evaluate
the advantage of the Extreme UV lithography over X-ray and electron beam
lithography in the approach of microfabrication.
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